High Vacuum Freeze Magnetron Sputtering Film System

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Dongguan City Jinyao Exactitude Equipment Co., Ltd.

China - Dongguan

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Trade Capacity

Export Percentage

0-30%

Nearest Port

Cape Down

Accepted Delivery Terms

CIF

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Accepted Payment Currency

USD

Average Lead Time

90 Day(s)

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Product Details

Product Specifications Product Description

Product Specifications

Product Description

Details: Refueling methods Disk replacement (20disks) The high vacuum pump :10 inch high vacuum freeze pump Rough vacuum pump : mechanical pump ,pumping rate:1000L/min Vacuum chamber :stainless steel,circulating cooling water pipe Sputtering target source : 5*15 inch magnetic field surrounding plane cathode *4 vacuometer :Global acuum ,Low vacuum device Sputtering power : 10kw DC plasma power supply *4 Process control : Automatic control of touch screen operation unit Process gas argon 0 to 200 sccm, oxygen 0 to 10 sccm Working pressure 1.5E - 1 , 1E -5 Torr Stream-mode vacuum sputtering system capacity table(Thin film resistance capacity table ): Continuous operate Full load 20 disks sputtering time Production time/ stove Every day can be produced /stove 30 minutes fast:100cm/min 2ominutes 50minntes 28 stoves 30 minutes slow :20cm/min 100mintues 130 mintues 11 stoves

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